Evaluating aligned large language models' (LLMs) ability to recognize and reject unsafe user requests is crucial for safe, policy-compliant deployments. Existing evaluation efforts, however, face three limitations that we address with SORRY-Bench, our proposed benchmark. First, existing methods often use coarse-grained taxonomies of unsafe topics, and are over-representing some fine-grained topics. For example, among the ten existing datasets that we evaluated, tests for refusals of self-harm instructions are over 3x less represented than tests for fraudulent activities. SORRY-Bench improves on this by using a fine-grained taxonomy of 44 potentially unsafe topics, and 440 class-balanced unsafe instructions, compiled through human-in-the-loop methods. Second, evaluations often overlook the linguistic formatting of prompts, like different languages, dialects, and more --- which are only implicitly considered in many evaluations. We supplement SORRY-bench with 20 diverse linguistic augmentations to systematically examine these effects. Third, existing evaluations rely on large LLMs (e.g., GPT-4) for evaluation, which can be computationally expensive. We investigate design choices for creating a fast, accurate automated safety evaluator. By collecting 7K+ human annotations and conducting a meta-evaluation of diverse LLM-as-a-judge designs, we show that fine-tuned 7B LLMs can achieve accuracy comparable to GPT-4 scale LLMs, with lower computational cost. Putting these together, we evaluate over 50 proprietary and open-weight LLMs on SORRY-Bench, analyzing their distinctive safety refusal behaviors. We hope our effort provides a building block for systematic evaluations of LLMs' safety refusal capabilities, in a balanced, granular, and efficient manner. Benchmark demo, data, code, and models are available through https://sorry-bench.github.io.